“Micro-nanostructure dynamic characteristic tester” project started in Tianjin

[ China Instrument Network Instrument Development ] On March 15th, the national key research and development plan “Major scientific equipment development” key project “Micro-nano structure dynamic characteristic tester” project was launched in Tianjin. In the future, the project will be able to detect the “nano” level of precision components, make up for the shortage of human identification and testing, and provide support for the development of Tianjin's advanced manufacturing industry. The project has a total investment of 14.48 million yuan and the implementation period is 3 years.

The “Micro-nano Structure Dynamic Characteristic Tester” project was led by Tiandi Weiye Technology Co., Ltd., and was jointly undertaken by 8 units including Tsinghua University, Yuyao Haoyu Intelligent Optical Technology Co., Ltd., Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, and Tianjin University. .
Scientific instruments and equipment are the cornerstone of scientific research and technological innovation, and an important guarantee for economic and social development and national defense security. But at present, China's component measurement relies on imported instruments and equipment. Therefore, China has included the “Micro-nano Structure Dynamic Characteristics Tester” project in the “National Key R&D Program” to support the research and industrialization of high-precision instruments. At present, Tianjin is focusing on building key high-tech industries such as artificial intelligence, new energy and new materials, and biomedicine, especially in the micro-nano manufacturing field.
The “Micro-nano Structure Dynamic Characteristic Tester” project focuses on the requirements of micro-nano structure and micro-electromechanical system (MEMS) device dynamic characteristics test, breaks through key technologies such as air-conditioning system and auto-focusing at high signal-to-noise ratio, and develops independent intellectual property rights. The micro-nano structure dynamic characteristic tester with stable and reliable quality and localized core components develops related software and database to realize the characteristic measurement analysis and typical defect identification of micro-nano structure and MEMS device vibration frequency, mode mode and so on.
After the completion of the project, it will break the technological monopoly of foreign companies, realize the localization of high-performance key components and the serialization of micro-structure dynamic characteristics test products, and carry out application development and demonstration in the field of aerospace and civilian MEMS R&D and production, and realize instrument engineering and Industrialization promotion.
According to statistics, there are currently 141 national-level major scientific instruments specializing in enterprises, which is to form a group of world-competitive instrument enterprises in China to provide support for domestic industrial development.
(Source: Northern Network, Ministry of Science and Technology, Shanghai Institute of Metrology and Testing Technology)

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